SiC MOSFET 器件栅氧可靠性研究综述

SiC MOSFET 器件栅氧可靠性研究综述

胡嘉豪, 王英伦, 代豪豪, 邓小川, 张波

Review on Gate Oxide Reliability of SiC MOSFET Devices

HU Jiahao, WANG Yinglun, DAI Haohao, DENG Xiaochuan, ZHANG Bo

电源学报 . 2024, (4): 1 -11 . DOI: 10.13234/j.issn.2095-2805.2024.4.1