垂直结构氮化镓功率晶体管的材料与工艺问题

垂直结构氮化镓功率晶体管的材料与工艺问题

肖明,胡杰,张宇昊

Materials and Processing Issues in Vertical GaN Power Transistors

XIAO Ming, HU Jie and ZHANG Yuhao

电源学报 . 2019, (3): 16 -25 . DOI: 10.13234/j.issn.2095-2805.2019.3.16