放电泵浦准分子激光充电电源工作模式分析和性能优化

沈启辉, 任嘉成, 邵景珍, 林颖, 梁勖

Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply

SHEN Qihui, REN Jiacheng, SHAO Jingzhen, LIN Ying, LIANG Xu

电源学报 . 2026, (1): 321 -329 . DOI: 10.13234/j.issn.2095-2805.2026.1.321