六英寸Si基GaN功率电子材料及器件的制备与研究
何亮,张晓荣,倪毅强,罗睿宏,李柳暗,陈建国,张佰君,刘扬
Fabrication and Research on GaN-based Power Electronic Materials and Devices on 6-inch Si Substrate
HE Liang, ZHANG Xiaorong, NI Yiqiang, LUO Ruihong, LI Liuan, CHEN Jianguo, ZHANG Baijun and LIU Yang
电源学报
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2019, (3): 26
-37
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DOI: 10.13234/j.issn.2095-2805.2019.3.26