Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply

Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply

SHEN Qihui, REN Jiacheng, SHAO Jingzhen, LIN Ying, LIANG Xu

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Journal of Power Supply ›› 2026, Vol. 24 ›› Issue (1) : 321-329. DOI: 10.13234/j.issn.2095-2805.2026.1.321

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Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2026, 24(1): 321-329 https://doi.org/10.13234/j.issn.2095-2805.2026.1.321

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